The microscope is equipped with a long working distance objective. A 3 step zoom allows the user to choose the right field of view and magnification. An IR sensitive camera displays the image of the inspected device via USB on your computer. The resolution is better than 3 µm with a 5x objective.
Additionally, a top side illumination is available. This allows to use the microscope in a conventional mode and to inspect the top side of the wafer. The IR microscope is equipped with a xy-table, which accommodates 8” or smaller wafers. The table is motor driven and can be controlled with a joystick.